Substrate processing system and method of installing plc software
AssigneeASM IP Holding B.V.
InventorTaku OMORI
Life of this patent
Estimating the term…
Abstract
A substrate processing system includes a main controller, a module controller connected to the main controller, the module controller controlling a device on the basis of a command from the main controller, and a programmable logic controller connected to the module controller, wherein the module controller automatically downloads, from the main controller, module controller software to be used for control of the module controller, PLC software to be used for control of the programmable logic controller, and an automatic transfer software for automatically transferring the PLC software to the programmable logic controller.
Claims9
A substrate processing system comprising:
- a main controller;
- a module controller connected to the main controller, the module controller controlling a device on the basis of a command from the main controller;
- and
- a programmable logic controller connected to the module controller,
- wherein the module controller automatically downloads, from the main controller, module controller software to be used for control of the module controller, PLC software to be used for control of the programmable logic controller, and an automatic transfer software for automatically transferring the PLC software to the programmable logic controller.
A method of installing PLC software, comprising:
- a downloading step in which a module controller automatically downloads, from a main controller, module controller software to be used for control of the module controller, PLC software to be used for control of a programmable logic controller, and an automatic transfer software for automatically transferring the PLC software to the programmable logic controller;
- and
- a transfer step in which when the automatic transfer software downloaded to the module controller is executed, the automatic transfer software transfers the PLC software to the programmable logic controller.
Dependencies are inferred from the claim text.