US 2016/0291088 A1Published application

Advanced 4-dimensional signal and device testing using circuit-state recognition

AssigneeAttofemto, Inc.

InventorPaul L. Pfaff

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Abstract

The Fast Fourier transform describes functions into different dimensions or coordinates such as Cartesian to spherical. For example, a function could be represented in the domains of time and frequency. The concept of the 3-D FFT has the same form as the mathematical representation of the 2-D FFT utilizing a 1-D FFT. This technique is essentially a spatial filtering operation in which the hologram functions as a matched filter. It has been applied here, to function as 4-D FFT by adding the dimension of time to recognize the presence of a specific electronic circuit and detect the moment when specific voltage levels or signals are present within or acting upon, the circuit or device under test and development. Any dynamic changes in the test object from ideal or recorded conditions, such as by defects in the device under test's circuitry or from prescribed voltage or signal induced operating parameters, will not result in the reconstruction of the desired object wave or holographic image.

Claims11

Dependent claims

A method for testing, developing, and evaluating a device under test, or evaluating the manufacture thereof comprising:

obtaining digital data for determining, shaping or testing a semiconductor or anisotropic device and materials under test, using the steps:
(a) providing a beam of light from a light source having a first wavelength to which the device under test is transparent, semitransparent, or reflective,
(b) in a first beam instance imposing said beam of light on a test device over a spatial region within said test device substantially greater than said first wavelength, wherein said test device has a first state of refractive indexes;
(c) in a second beam instance imposing said beam of light on said test device over a spatial region within said test device substantially greater than said first wavelength, wherein said test device has a second state of refractive indexes;
(d) wherein said first state of refractive indexes is at a first voltage potential or electromagnetic field state, and wherein said second state of refractive indexes is at a second or subsequent voltage potential or electromagnetic field state different from said first voltage potential or electromagnetic field state;
(e) obtaining, displaying, transmitting, processing, or storing first electric digital data resulting from the interference of said first beam instance within said device under test representative of the voltages within said region or target feature and obtaining second electric digital data resulting from the interference of said second beam instance within said device or target feature under test representative of the voltages within said region, and comparing by electric digital data processing said first and second electric digital data to determine operating characteristics or attributes of devices within said device under test;
(f) calculating a matched spatial filter or a hologram using a Fast Fourier Transform of the target portion or feature using as point reference source at least one of the following, a hypothetical test condition, or a predetermined test characteristic of experimental data, a feature or at specific moment of time or event affecting the device, stored data utilizing the integrated circuit design or layout tools, or specific operating characteristics of the said device under test;
(g) positioning the match spatial filter such that the calculated complex amplitude is relative to the device or condition under test and the photo detector device;
and
(h) detecting, displaying, transmitting, processing, or storing at least one of said operating characteristics or events.

7 more elements

A method for testing, developing, and evaluating a device under test, or evaluating the manufacture thereof comprising:

obtaining digital data for determining, shaping or testing a semiconductor or anisotropic device and materials under test, using the steps:
(a) providing a beam of light from a light source having a first wavelength to which the device under test is transparent, semitransparent, opaque, or reflective;
(b) imposing said beam of light on a test device over a spatial region within said test device substantially greater than said first wavelength, wherein said test device has at least a first state of birefringence or refraction;
(c) imposing said beam of light on said test device over a spatial region within said test device substantially greater than said first wavelength, wherein said test device has at least a second state of birefringence or refraction;
(d) wherein said first state of birefringence or refraction is at a first voltage potential, and wherein said second state of birefringence or refraction is at a second or subsequent voltage potential or electromagnetic field state different from said first voltage potential or subsequent or electromagnetic field state.
(e) obtaining, displaying, transmitting, processing, or storing first electric digital data resulting from the interference of said first beam instance within said device under test representative of the voltages within said region or target feature and obtaining second electric digital data resulting from the interference of said second beam instance within said device or target feature under test representative of the voltages within said region, and comparing by electric digital data processing said first and second electric digital data to determine operating characteristics or attributes of devices within said device under test;
(f) calculating a matched spatial filter using a Fast Fourier Transform of the target portion or feature using as point reference source at least one of the following, a hypothetical test condition, or a predetermined test characteristic of experimental data, a feature or at specific moment of time or event affecting the device, stored data utilizing the integrated circuit design or layout tools, or specific operating characteristics of the said device under test;
and
(g) positioning the match spatial filter such that the calculated complex amplitude is relative to the device or condition under test and the photo detector device.

6 more elements

A method for testing, developing, and evaluating a device under test, or evaluating the manufacture thereof comprising:

obtaining digital data for determining, shaping or testing a semiconductor or anisotropic device and materials device:
under test comprising, using the steps:
(a) providing a coherent beam of light from a light source having a first wavelength to which the device under test is transparent, semitransparent, opaque, or reflective;
(b) imposing said coherent beam of light on a test device over a spatial region within said test device greater than said first wavelength, wherein said test device has a first state;
(c) imposing said beam of light on said test device over a spatial region within said test device greater than said first wavelength, wherein said test device has a second state;
(d) wherein said first state is at a first voltage potential or electromagnetic field state, and wherein said second state is at a second voltage potential or electromagnetic field different from said first voltage potential or electromagnetic field state;
(e) obtaining, displaying, transmitting, processing, or storing first electric digital data resulting from the interference of said first beam instance within said device under test representative of the voltages within said region or target feature and obtaining second electric digital data resulting from the interference of said second beam instance within said device or target feature under test representative of the voltages within said region, and comparing by electric digital data processing said first and second electric digital data to determine operating characteristics or attributes of devices within said device under test;
(f) calculating a matched spatial filter using a Fast Fourier Transform of the target portion or feature using as point reference source at least one of the following, a hypothetical test condition, or a predetermined test characteristic of experimental data, a feature or at specific moment of time or event affecting the device, stored data utilizing the integrated circuit design or layout tools, or specific operating characteristics of the said device under test;
and
(g) positioning the match spatial filter such that the calculated complex amplitude is relative to the device or condition under test and the photo detector device.

7 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/178,418Filed 9 Jun 2016
Priority: 26 Jul 1999
Published: 6 Oct 2016
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01R 31/311
Using non-ionising electromagnetic radiation, e.g. optical radiation: of integrated circuits
G01R 15/241
Using light-modulating devices: using electro-optical modulators, e.g. electro-absorption
G01R 31/2653
Contactless testing: using electron beams
G01R 31/2656
Contactless testing: using non-ionising electromagnetic radiation, e.g. optical radiation

Family

Application60/145,617Us provisional application · filed 26 Jul 1999
Application09/626,420Continuation · filed 26 Jul 2000
Application10/219,599Continuation · filed 14 Aug 2002
Application10/660,189Continuation · filed 10 Sep 2003
Application11/050,034Continuation · filed 3 Feb 2005
Application11/536,617Continuation · filed 28 Sep 2006
Application12/172,629Continuation · filed 14 Jul 2008
Application12/422,210Continuation · filed 10 Apr 2009
Application13/269,402Continuation · filed 7 Oct 2011
Application13/786,176Continuation · filed 5 Mar 2013
Application14/109,362Continuation · filed 17 Dec 2013
Application15/178,418Continuation
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