Structure with an improved capacitor
AssigneesIpdia, Commissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFrédéric VOIRON, Guy PARAT
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AssigneesIpdia, Commissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFrédéric VOIRON, Guy PARAT
Estimating the term…
A Metal-Insulator-Metal type capacitor structure (1) comprising a substrate (2), a first electrically insulating layer (14) placed on the substrate (2), a lower electrode (6) placed on the first insulating layer (14), a layer of structured metal (12) comprising a plurality of pores disposed on the lower electrode (6), a MIM capacitor (4) comprising a first conductive layer (18) placed on the structured metal layer (12) in contact with the lower electrode (6) and inside the pores, a dielectric layer (20) covering the first conductive layer (18), a second conductive layer (24) covering the dielectric layer (20) in contact with an upper electrode (8) placed on the MIM capacitor (4) and a second electrically insulating layer (16) placed on the upper electrode (8).
A Metal-Insulator-Metal type capacitor structure comprising:
A process for producing a Metal-Insulator-Metal type capacitor structure, comprising:
Dependencies are inferred from the claim text.