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US 2016/0261209 A1Published application
Row and column actuator control
AssigneeDigitalOptics Corporation MEMS
InventorROMAN C. GUTIERREZ
Life of this patent
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Abstract
In one embodiment, a device is provided that includes: a plurality of actuators arranged into a plurality of rows and a plurality of columns; a plurality of row conductors corresponding to the plurality of rows; a plurality of column conductors corresponding to the plurality of columns; and a controller configured to select at least one of the actuators a row by raising a voltage on the corresponding row conductor to couple each selected actuator to its corresponding column conductor.
Claims10
A device comprising:
- a cascaded electrostatic actuator defining a stack in a substrate having a plurality of isolated plates, each isolated plate being surrounded by a corresponding gap between the isolated plate and the substrate;
- and
- a controller configured to drive the cascaded electrostatic actuator to open and close selected ones of the gaps,
- wherein the substrate surrounding a corresponding isolated plate is deformed when the corresponding isolated plate is actuated.
1 more element
Dependencies are inferred from the claim text.