Solar cell, manufacturing method thereof, and solar cell module

A manufacturing method of a solar cell comprising:

• a first step of forming an impurity diffusion layer on one surface side of a first-conductivity-type semiconductor substrate, which is to be a light receiving surface side, by diffusing a second-conductivity-type impurity element into the one surface side of the semiconductor substrate;
• a second step of forming a plurality of linear light-receiving-surface-side electrodes on the one surface side of the semiconductor substrate by multi-layer printing of an electrode material paste by using screen printing, the light-receiving-surface-side electrodes extending in parallel in a specific direction in a plane direction of the semiconductor substrate and being electrically connected to the impurity diffusion layers;
• and
• a third step of forming a back-surface-side electrode on another surface side of the semiconductor substrate, the back-surface-side electrode being electrically connected to the another surface side of the semiconductor substrate, wherein
• the second step includes
• printing a lower-layer electrode material paste during the multi-layer printing with a plurality of printed patterns that get smaller in width as the printed patterns get closer in a width direction of the light-receiving-surface-side electrodes to the specific reference position, and
• printing, by using a printing mask that has a plurality of opening patterns disposed in parallel at equal intervals in the width direction of the light-receiving-surface-side electrodes, an upper-layer electrode material paste during the multi-layer printing on the printed patterns of the lower-layer electrode material paste such that a printed pattern of the lower-layer electrode material paste that is closest to the specific reference position in the width direction of the light-receiving-surface-side electrodes and an opening pattern corresponding to a position of the printed pattern are aligned with each other, the opening patterns having a same width that is smaller than a width of the printed pattern of the lower-layer electrode material paste that is closest to the specific reference position in the width direction of the light-receiving-surface-side electrodes.