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US 2016/0260849 A1Published application
Integrated photodetector waveguide structure with alignment tolerance
AssigneeInternational Business Machines Corporation
InventorsSolomon Assefa, Bruce W. Porth, Steven M. Shank
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Abstract
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
Claims15
A sensor structure, comprising:
- a waveguide structure bounded by one or more shallow trench isolation (STI) structures;
- and
- a photodetector fully landed on the waveguide structure, adjacent to the one or more STI structures.
Dependencies are inferred from the claim text.