Non-volatile memory device and method of manufacturing the same

A method of manufacturing a non-volatile memory device, the method comprising:

• sequentially forming a preliminary tunnel insulation pattern and a preliminary charge storage pattern on each of a plurality of active patterns of a substrate, each of the plurality of active patterns extending in a first direction;
• defining a trench between structures, each structure including an active pattern of the plurality of active patterns, a corresponding preliminary tunnel insulation pattern, and a corresponding preliminary charge storage pattern sequentially stacked;
• forming a liner on an inner wall of the trench;
• forming a preliminary isolation pattern on the liner to partially fill the trench, the preliminary isolation pattern including a material different from a material of the liner;
• sequentially forming a dielectric layer and a control gate electrode layer on the preliminary charge storage pattern, the liner, and the preliminary isolation pattern;
• patterning the control gate electrode layer, the dielectric layer, the preliminary charge storage pattern, and the preliminary tunnel insulation pattern to form a plurality of gate structures, each gate structure extending in a second direction substantially perpendicular to the first direction, each of the gate structure including a tunnel insulation pattern, a charge storage pattern, a dielectric layer pattern, and a control gate electrode sequentially stacked;
• isotropically etching a portion of the preliminary isolation pattern to form an isolation pattern and a first air gap on the isolation pattern, the first air gap extending in the first direction and having a bent top,
• wherein a first length of the first air gap under the gate structures in a third direction substantially perpendicular to a top surface of the substrate is greater than a first width of the first air gap under the gate structures in the second direction;
• and
• forming an insulating interlayer between the gate structures to keep the first air gap.