Semiconductor device

A semiconductor device comprising:

• a semiconductor substrate including a diode region and an IGBT region;
• an anode electrode provided on a front surface of the semiconductor substrate in the diode region;
• a cathode electrode provided on a rear surface of the semiconductor substrate in the diode region;
• an emitter electrode provided on the front surface of the semiconductor substrate in the IGBT region;
• a collector electrode provided on the rear surface of the semiconductor substrate in the IGBT region;
• a gate insulating film;
• and
• a gate electrode,
• wherein the diode region comprises:
• a p-type front side anode region connected to the anode electrode;
• an n-type diode barrier region provided on a back side of the front side anode region;
• an n-type diode pillar region connected to the anode electrode, the diode pillar region reaching the diode barrier region through the front side anode region from the front surface of the semiconductor substrate;
• a p-type back side anode region provided on a back side of the diode barrier region, separated from the front side anode region by the diode barrier region, and having a p-type impurity concentration lower than a p-type impurity concentration of the front side anode region;
• and
• an n-type cathode region provided on a back side of the back side anode region, separated from the diode barrier region by the back side anode region, and connected to the cathode electrode,
• the IGBT region comprises:
• an n-type emitter region connected to the emitter electrode;
• a p-type front side body region provided on a back side of the emitter region;
• an n-type IGBT barrier region provided on a back side of the front side body region and separated from the emitter region by the front side body region;
• a p-type back side body region provided on a back side of the IGBT barrier region, separated from the front side body region by the IGBT barrier region, and having a p-type impurity concentration lower than a p-type impurity concentration of the front side body region;
• an n-type IGBT drift region provided on a back side of the back side body region, separated from the IGBT barrier region by the back side body region, and connected to the cathode region;
• and
• a p-type collector region provided on a back side of the IGBT drift region, separated from the back side body region by the IGBT drift region, and connected to the collector electrode,
• wherein
• the gate electrode faces, via the gate insulating film, the front side body region and the back side body region that are located in a range where the emitter region and the IGBT drift region are separated by the front side body region and the side body region, and
• a resistance between the IGBT barrier region and the emitter electrode is higher than a resistance between the diode barrier region and the anode electrode when a gate-off voltage is applied to the gate electrode.