Mom capacitor circuit and semiconductor device thereof
AssigneePowerchip Technology Corporation
InventorsShozo Kawabata, Nobuhiko Ito
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AssigneePowerchip Technology Corporation
InventorsShozo Kawabata, Nobuhiko Ito
Estimating the term…
A capacitor circuit formed by a plurality of capacitors using metal electrodes formed on a substrate is provided, such that the capacitance of the capacitor can be adjusted with higher precision as compared to the conventional art. The MOM capacitor includes a plurality of MOM (Metal-Oxide-Metal) capacitors respectfully formed by pairs of metal electrodes facing each other through an insulating film on a substrate. The MOM capacitor circuit is formed by at least one capacitor element in a manner that each of the pairs of the metal electrodes of the MOM capacitors is connected to a first terminal and a second terminal through a connecting conductor; and at least one switch element, connected to the plurality of metal electrodes and at least one of the first terminal and the second terminal, wherein a capacitance of the MOM capacitor circuit is adjusted by turning on/off the switch element.
A MOM capacitor circuit comprising:
(canceled)
A semiconductor device, comprising:
(canceled)
Dependencies are inferred from the claim text.