Method for Increasing Adhesion of Copper to Polymeric Surfaces
AssigneeTel Nexx, Inc.
InventorsGeorgiy Seryogin, Stephen N. Golovato, Ramya Chandrasekaran
Life of this patent
Estimating the term…
Loading patent…
AssigneeTel Nexx, Inc.
InventorsGeorgiy Seryogin, Stephen N. Golovato, Ramya Chandrasekaran
Estimating the term…
Disclosed herein are methods and systems for conditioning a polymeric layer on a substrate to enable adhesion of a metal layer to the polymeric layer. Techniques may include conditioning the polymeric layer with nitrogen-containing plasma to generate a nitride layer on the surface of the polymeric layer. In another embodiment, the conditioning may include depositing a CuN layer using a lower power copper sputtering process in a nitrogen rich environment. Following the condition process, a higher power copper deposition or sputtering process may be used to deposit copper onto the polymeric layer with good adhesion properties.
A method for adhering metal to a polymeric material, comprising:
A method for depositing a metal layer on a packaged electronic device, the method comprising:
A method for depositing a metal layer on a packaged electronic device, comprising:
Dependencies are inferred from the claim text.