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US 2016/0260669 A1Published application
Finfets having step sided contact plugs and methods of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSun Hom PAAK, Sung Min KIM
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes an active fin extending in a first direction on a substrate, a gate electrode intersecting the active fin and extending in a second direction, source/drain regions disposed on the active fin on both sides of the gate electrode, and a contact plug disposed on the source/drain regions. The contact plug has at least one side extending in the second direction which has a step portion having a step shape.
Claims26
A semiconductor device comprising:
- an active fin extending in a first direction on a substrate;
- a gate electrode intersecting the active fin and extending in a second direction that is different from the first direction;
- a source/drain region on the active fin on both sides of the gate electrode;
- and
- a contact plug on the source/drain region on one side of the gate electrode and extending in the second direction, the contact plug having a side extending in the second direction which has a step portion having a step shape.
2 more elements
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-8. (canceled)
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-23. (canceled)
A semiconductor device comprising:
- a substrate having an active region;
- a gate electrode on the active region that crosses the active region;
- source/drain regions on the active region and elevated from the substrate;
- and
- a contact plug on the source/drain regions and having an asymmetrical shape in a direction of the gate electrode extending and intersecting the active region.
2 more elements
-29. (canceled)
A semiconductor device comprising:
- an active fin extending in a first direction on a substrate;
- a gate electrode intersecting the active fin and extending in a second direction that is different from the first direction;
- first and second source/drain regions, a respective one of which is on the active fin on respective opposing sides of the gate electrode;
- and
- a contact plug on the first source/drain region and extending in the second direction, the contact plug having a side extending in the second direction that comprises a plurality of line segments when viewed in cross-section.
2 more elements
Dependencies are inferred from the claim text.