Source Down Semiconductor Devices and Methods of Formation Thereof
AssigneeInfineon Technologies AG
InventorsManfred Schneegans, Andreas Meiser, Martin Mischitz, Michael Roesner, Michael Pinczolits
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AssigneeInfineon Technologies AG
InventorsManfred Schneegans, Andreas Meiser, Martin Mischitz, Michael Roesner, Michael Pinczolits
Estimating the term…
A method for forming a semiconductor device includes forming device regions in a semiconductor substrate having a first side and a second side. The device regions are formed adjacent the first side. The method further includes forming a seed layer over the first side of the semiconductor substrate, and forming a patterned resist layer over the seed layer. A contact pad is formed over the seed layer within the patterned resist layer. The method further includes removing the patterned resist layer after forming the contact pad to expose a portion of the seed layer underlying the patterned resist layer, and forming a protective layer over the exposed portion of the seed layer.
A semiconductor device comprising:
A semiconductor device comprising:
An assembled semiconductor device comprising:
Dependencies are inferred from the claim text.