Holding and rotating apparatus for flat objects

Holding and rotating apparatus for flat objects which define an object plane, the holding and rotating apparatus comprising:

• a gripping device rotatable about a rotational axis, wherein the gripping device has a plurality of edge grippers and is arranged to fix the object in a position defined in all three dimensions of space in which the object plane is aligned perpendicular to the rotational axis;
• a rotary drive coupled with the gripping device, wherein the rotary drive is arranged to rotate the gripping device with the object around the rotational axis;
• and
• a distance positioning device arranged to apply a supporting force directed perpendicular to the object plane against the object without contact.

Wafer inspection system comprising:

• a holding and rotating apparatus including:
• a gripping device rotatable about a rotational axis, wherein the gripping device has a plurality of edge grippers and is arranged to fix the object in a position defined in all three dimensions of space in which the object plane is aligned perpendicular to the rotational axis,
• a rotary drive coupled with the gripping device, wherein the rotary drive is arranged to rotate the gripping device with the object around the rotational axis, and
• a distance positioning device arranged to apply a supporting force directed perpendicular to the object plane against the object without contact;
• and
• an inspection unit arranged on the access side and directed toward the object plane.

Method for holding and turning flat objects, the method comprising:

• gripping an object in its edge area by means of a gripping device, wherein the object is fixed in a position defined in all spatial directions;
• turning the gripping device together with the object around a rotational axis that is oriented perpendicular to an object plane defined by the object;
• and
• applying a supporting force is applied to the object perpendicular to the object plane without contact by means of a distance positioning device.