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US 2016/0259872 A1Published application
Systems and methods for tuning an impedance matching network in a step-wise fashion
AssigneeLam Research Corporation
InventorsArthur M. Howald, John C. Valcore, JR., Andrew Fong, David Hopkins
Life of this patent
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Abstract
Systems and methods for tuning an impedance matching network in a step-wise fashion are described. By tuning the impedance matching network in a step-wise fashion instead of directly to achieve optimum values of a radio frequency (RF) and a combined variable capacitance, processing of a wafer using the tuned optimal values becomes feasible.
Claims21
A method for tuning an impedance matching network in a step-wise fashion, comprising:
- receiving a first measured input parameter value sensed between an output of a radio frequency (RF) generator and an input of an impedance matching network when the RF generator operates at a first parametric value and the impedance matching network has a first variable measurable factor;
- initializing one or more models to have the first variable measurable factor and the first parametric value, wherein the one or more models include a match network model of the impedance matching network;
- calculating a first output parameter value using the one or more models from the first measured input parameter value when the one or more models have the first variable measurable factor and the first parametric value;
- computing, using the first output parameter value and the one or more models, an optimum parametric value and an optimum variable measurable factor for which a reflection coefficient at an input of the one or more models is zero;
- calculating, using the first output parameter value and the one or more models, a first favorable parametric value for which the reflection coefficient at the input of the one or more models is at a minimum;
- operating the RF generator at the first favorable parametric value;
- and
- setting the impedance matching network to have a first step variable measurable factor, wherein the first step variable measurable factor is closer to the optimum variable measurable factor compared to the first variable measurable factor so that the impedance matching network is tuned in a step-wise fashion.
5 more elements
A system for tuning an impedance matching network in a step-wise fashion, comprising:
- a processor configured to receive a first measured input parameter value sensed between an output of a radio frequency (RF) generator and an input of an impedance matching network when the RF generator operates at a first parametric value and the impedance matching network has a first variable measurable factor,
- wherein the processor is configured to initialize one or more models to have the first variable measurable factor and the first parametric value, wherein the one or more models include a model of the impedance matching network;
- and
- a memory device connected to the processor, wherein the memory device is configured to store the one or more models,
- wherein the processor is configured to calculate a first output parameter value using the one or more models from the first measured input parameter value when the one or more models have the first variable measurable factor and the first parametric value,
- wherein the processor is configured to compute, using the first output parameter value and the one or more models, an optimum parametric value and an optimum variable measurable factor for which a reflection coefficient at an input of the one or more models is zero;
- wherein the processor is configured to calculate, using the first output parameter value and the one or more models, a first favorable parametric value for which the reflection coefficient at the input of the one or more models is at a minimum,
- wherein the processor is configured to operate the RF generator at the first favorable parametric value,
- wherein the processor is configured to set the impedance matching network to have a first step variable measurable factor, wherein the first step variable measurable factor is closer to the optimum variable measurable factor compared to the first variable measurable factor so that the impedance matching network is tuned in a step-wise fashion.
6 more elements
A system for tuning an impedance matching network in a step-wise fashion, comprising:
- a radio frequency (RF) generator having an output;
- an impedance matching network connected to the output of the RF generator;
- a plasma chamber connected to the impedance matching network via an RF transmission line;
- and
- a processor coupled to the RF generator,
- wherein the processor is configured to receive a first measured input parameter value sensed between the output of the RF generator and the input of an impedance matching network when the RF generator operates at a first parametric value and the impedance matching network has a first variable measurable factor,
- wherein the processor is configured to initialize one or more models to have the first variable measurable factor and the first parametric value, wherein the one or more models include a match network model of the impedance matching network,
- wherein the processor is configured to calculate a first output parameter value using the one or more models from the first measured input parameter value when the one or more models have the first variable measurable factor and the first parametric value,
- wherein the processor is configured to compute, using the first output parameter value and the one or more models, an optimum parametric value and an optimum variable measurable factor for which a reflection coefficient at an input of the one or more models is zero;
- wherein the processor is configured to calculate, using the first output parameter value and the one or more models, a first favorable parametric value for which the reflection coefficient at the input of the one or more models is at a minimum,
- wherein the processor is configured to operate the RF generator at the first favorable parametric value,
- wherein the processor is configured to set the impedance matching network to have a first step variable measurable factor, wherein the first step variable measurable factor is closer to the optimum variable measurable factor compared to the first variable measurable factor so that the impedance matching network is tuned in a step-wise fashion.
9 more elements
Dependencies are inferred from the claim text.