Multimodal sensor and manufacturing method thereof

A method for manufacturing a multimodal sensor, comprising:

• arranging a plurality of first conductive electrodes on a first substrate;
• arranging a plurality of second conductive electrodes on a second substrate;
• forming an insulating layer on the first conductive electrodes;
• and
• connecting the first and second substrates with each other, so as to make the plurality of the second conductive electrodes contact on the insulating layer,
• wherein the connecting of the first and second electrodes with each other is forming the first and second conductive electrodes to cross one another.

A multimodal sensor, comprising

• a first conductive electrode,
• an insulating layer formed on the first conductive electrode,
• a second conductive electrode that is formed on the insulating layer, and crosses with the first conductive electrode, and
• a controller that applies voltages to the first and second conductive electrodes,
• wherein the controller detects capacitance formed between the first and second conductive electrodes, and senses an external temperature, intensity of a pressure, or a position, to which a pressure is applied, in response to a variation of the capacitance.

A method for manufacturing a multimodal sensor, comprising:

• forming a first conductive electrode on a first substrate in a plane shape;
• forming a second conductive electrode on a second substrate in a plane shape;
• forming an insulating layer on the first conductive electrode;
• and
• connecting the first and second substrates with each other, so as to make the second conductive electrode contact on the insulating layer,
• wherein the connecting of the first and second electrodes with each other is forming the first and second conductive electrodes to cross each other.