Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method

A method of making an exposure apparatus that exposes a substrate with illumination light via an optical system, the method comprising:

• providing a stage that is disposed below the optical system and has a holder to hold the substrate;
• providing a carrier system that is disposed above the stage and has a first support member, the first support member supporting the substrate in a noncontact manner from a surface side of the substrate, and the surface side being irradiated with the illumination light;
• providing a second support member different from the first support member, the second support member supporting the substrate in a contact manner from a rear surface side of the substrate;
• providing a drive system that is coupled to the first and the second support members, and moves at least the second support member so that relative movement between the first and the second support members and relative movement between the second support member and the holder are performed at least in a vertical direction;
• and
• providing a controller that controls the carrier system and the drive system so that the substrate is carried from the first support member to the holder via the second support member.