Support apparatus for an optical device, optical device and lithography system

An optical apparatus, comprising:

• an optical element;
• and
• a support device configured to hold the optical element, the support device comprising:
• a first support element;
• a second support element;
• a first flexure bearing;
• and
• a second flexure bearing,
• wherein:
• the first flexure bearing connects the first and second support elements to each other in a thermally conductive manner;
• the second flexure bearing connects the first and second support elements to each other in a thermally conductive manner;
• the first and second flexure bearings hold the first and second support elements so that the first support element is moveable relative to the second support element in a first direction;
• and
• the support device is configured so that, when the first support element moves relative to the second support element in the first direction, a spring force generated by the first flexure bearing and a spring force generated by the second flexure bearing at least partially cancel each other out.

An installation, comprising:

• an illumination system;
• and
• a projection lens,
• wherein the installation further comprises:
• an optical element;
• and
• a support device configured to hold the optical element, the support device comprising:
• a first support element;
• a second support element;
• a first flexure bearing;
• and
• a second flexure bearing, and
• wherein:
• the first flexure bearing connects the first and second support elements to each other in a thermally conductive manner;
• the second flexure bearing connects the first and second support elements to each other in a thermally conductive manner;
• the first and second flexure bearings hold the first and second support elements so that the first support element is moveable relative to the second support element in a first direction;
• the support device is configured so that, when the first support element moves relative to the second support element in the first direction, a spring force generated by the first flexure bearing and a spring force generated by the second flexure bearing at least partially cancel each other out;
• and
• the installation is a lithography installation.