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US 2016/0259245 A1Published application
Reagent for enhancing generation of chemical species and manufacturing apparatus
AssigneeToyo Gosei Co., Ltd.
InventorsSatoshi Enomoto, Takashi Miyazawa
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Abstract
A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.
Claims27
-21. (canceled)
A composition used in the method of claim 42, the composition comprising:
- a first reagent capable of generating a first chemical species in at least one of the composition, a solution containing the composition, and a film formed from the composition;
- and
- a precursor that is capable of generating a second chemical species through an interaction with the first chemical species.
-41. (canceled)
A method of manufacturing a device, the method comprising:
- placing a composition on a member such that a film including the composition is disposed on the member;
- first exposing the film to at least one of an electron beam and a first light, the wavelength of which is shorter than 50 nm;
- second exposing the film to a second light, the wavelength of which is different than the first wavelength;
- and
- third exposing the film to at least one of a third electromagnetic ray having a third wavelength and a third particle ray,
- wherein
- the second wavelength is longer than the third wavelength;
- the third wavelength is longer than the first wavelength;
- and
- the composition includes a first reagent able to generate a first chemical species and a precursor that generates a second chemical species.
7 more elements
-44. (canceled)
(canceled)
Dependencies are inferred from the claim text.