Polarization-independent differential interference contrast optical arrangement

Abstract

The present invention discloses an optical arrangement to be associated with an optical system and an external imaging system, a sample inspection imaging system and a method for generating a differential interference contrast (DIC) image. The optical arrangement comprises a beam-shearing interference module including at least two optical elements being at least partially reflective. A first optical element is configured and operable for receiving an image from the imaging system including an input beam and splitting the input beam into first and second light beams of the same amplitude and phase modulation. A second optical element is accommodated in first and second optical paths of the first and second light beams. At least one of the first and second optical elements is configured and operable for creating a shear between the first and second light beams. The second optical element is configured for reflecting the first and second light beams with a shear between them towards the detector to thereby generate a differential interference contrast (DIC) image.

Dependencies are inferred from the claim text.