US 2016/0258975 A1 · ACCELERATION SENSOR

Abstract

An acceleration sensor includes a detection device, an opposed electrode, and a top lid. The detection device includes an active layer, a base layer, an oxide layer disposed between the active layer and the base layer, a first insulating layer, a contact portion, and a self-check electrode. The first insulating layer is disposed on the active layer at a side opposite to the oxide layer and provided with a first opening. The contact portion is disposed on a part of the first insulating layer at a side opposite to the active layer and includes a first metal layer connected to the active layer through the first opening. The opposed electrode is disposed at a location opposing the self-check electrode, and the top lid supports the opposed electrode.

Claims17

Dependent claims

An acceleration sensor comprising:

a detection device including:
an active layer;
a base layer;
an oxide layer disposed between the active layer and the base layer;
a first insulating layer disposed on the active layer at a side opposite to the oxide layer and provided with a first opening;
a contact portion disposed on a part of the first insulating layer at a side opposite to the active layer and including a first metal layer connected to the active layer through the first opening, and
a self-check electrode disposed at a side of the first insulating layer opposite to the active layer and located away from the first metal layer;
an opposed electrode disposed at a location opposing the self-check electrode;
and
a top lid supporting the opposed electrode.

7 more elements

An acceleration sensor, comprising:

a detection device including:
an active layer;
a base layer;
an oxide layer disposed between the active layer and the base layer;
a first insulating layer disposed on the active layer at a side opposite to the oxide layer and provided with a first opening;
a frame including a part of the first insulating layer provided with the first opening, a part of the active layer, a part of the oxide layer, a part of the base layer, and a contact portion including a first metal layer disposed at a side of the first insulating layer opposite to the active layer and connected to the active layer through the first opening;
a beam including a part of the first insulating layer and a part of the active layer, and having a first end and a second end which is connected to the frame;
a detection portion disposed on the beam and capable of detecting an acceleration applied to the acceleration sensor;
a weight part including a part of the first insulating layer, a part of the active layer, a part of the oxide layer, and a part of the base layer, and connected to the first end of the beam;
and
a self-check electrode disposed on the first insulating layer in the weight part;
an opposed electrode disposed at a location opposing the weight part;
and
a top lid connected to the frame of the detection device and supporting the opposed electrode.

11 more elements

Dependencies are inferred from the claim text.

Acceleration sensor

Life of this patent

Acceleration sensor

Life of this patent

Abstract

Claims17