US 2016/0258738 A1Published application

Measuring probe

AssigneeMitutoyo Corporation

InventorsAtsushi SHIMAOKA, Tomoyuki MIYAZAKI, Kazuhiko HIDAKA

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Abstract

A measuring probe includes a stylus, an axial motion mechanism, and a rotary motion mechanism. The axial motion mechanism includes a pair of first diaphragm structures that allows a moving member to be displaced, and the rotary motion mechanism includes a second diaphragm structure that allows a rotating member to be displaced. The second diaphragm structure is disposed between the pair of first diaphragm structures in an axial direction. The respective first diaphragm structures are disposed at a symmetric distance with respect to the second diaphragm structure. This can reduce the length in the axial direction and weight thereof and also reduce shape errors and improve measurement accuracy.

Claims19

Dependent claims

A measuring probe including a stylus having a contact part to be in contact with an object to be measured, an axial motion mechanism having a moving member that allows the contact part to move in an axial direction, and a rotary motion mechanism having a rotating member that allows the contact part to move along a plane perpendicular to the axial direction by means of rotary motion, wherein

the axial motion mechanism includes a plurality of first diaphragm structures that allow the moving member to be displaced, and the rotary motion mechanism includes a second diaphragm structure that allows the rotating member to be displaced,
the second diaphragm structure is disposed between the plurality of first diaphragm structures in the axial direction,
the number of the first diaphragm structures is set to an even number, and
the respective first diaphragm structures are disposed at a symmetric distance with respect to the second diaphragm structure.

1 more element

Dependencies are inferred from the claim text.