Cryopump system, cryopump controller, and method for regenerating the cryopump

A cryopump controller comprising:

• a regeneration controller that controls a cryopump in accordance with a regeneration sequence including a discharging process for discharging a condensate from the cryopump, the discharging process being continued until a discharging completion condition based on pressure in the cryopump is met, wherein
• the regeneration controller includes:
• a first determiner that determines in a repetitive manner whether the discharging completion condition is met;
• a second determiner that determines whether the number of times of determination for the discharging completion condition or a period of time for which the discharging process continues is equal to or larger than a first threshold value;
• and
• a temperature controller that performs preliminary cooling of the cryopump if the number of times of determination for the discharging completion condition or the period of time for which the discharging process continues is equal to or larger than the first threshold value, and wherein
• the first determiner re-determines during the preliminary cooling whether the discharging completion condition is met.

A method for regenerating a cryopump comprising:

• controlling a cryopump in accordance with a regeneration sequence including a discharging process for discharging a condensate from the cryopump, the discharging process being continued until a discharging completion condition based on pressure in the cryopump is met, wherein
• the controlling includes:
• determining in a repetitive manner whether the discharging completion condition is met;
• determining whether the number of times of determination for the discharging completion condition or a period of time for which the discharging process continues is equal to or larger than a first threshold value;
• performing preliminary cooling of the cryopump if the number of times of determination for the discharging completion condition or the period of time for which the discharging process continues is equal to or larger than the first threshold value;
• and
• re-determining during the preliminary cooling whether the discharging completion condition is met.