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US 2016/0258069 A1Published application
Aluminum nanowire arrays and methods of preparation and use thereof
AssigneeThe Trustees of Boston College
InventorsNathan T. Nesbitt, Michael J. Naughton
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Abstract
The invention provides a novel, template-free process for the fabrication of metal nanowires of novel dimensions. The unconventional method produces highly ordered and freestanding aluminum nanowire arrays.
Claims21
Metal nanowire array comprising a plurality of vertically-oriented and laterally-ordered metal nanowires at discrete positions having substantially the same height with pitches between the nanowires being greater than about 1 μm.
A method for producing ordered metal nanowire arrays, comprising:
- providing a metal substrate;
- imprinting the surface of the metal substrate to form a plurality of indents and missing indents at lithographically-defined locations according to a pre-selected pattern;
- or masking the surface of the metal substrate to form a plurality of openings to the metal in place of indents at lithographically-defined locations according to a pre-selected pattern;
- anodizing the metal substrate to form a metal oxide template corresponding to the indents and missing indents, or corresponding to mask-openings and missing mask-openings, according to the pre-selected pattern;
- and
- etching the anodized metal oxide to form a plurality of vertically-oriented and laterally-ordered metal nanowires according to the pre-selected pattern.
3 more elements
(canceled)
Dependencies are inferred from the claim text.