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AssigneeJoseph Robert Pickens
InventorJoseph Robert Pickens
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The current invention teaches a process to add transition metals to a substrate with careful, spacial control to build up regions selectively, and a machine to enable this process to be performed. The process is amenable to doping with other gases to provide dispersion strengthening and/or to form metal matrix composites. In addition, the process is capable of forming laminar or topologically layered materials. In the present invention, a heated nozzle with a variable orifice projects carbonyl gas or gases at the appropriate temperature to precise locations on a surface. The coordinates on the substrate over which the nozzle is located can be computer controlled. Furthermore, the orifice of the nozzle and the flow rate are controlled to widen or narrow the area of deposition. The substrate can be heated to a temperature where transition metal carbonyl deposition is optimal or near optimal, or heated below the optimal region such that the heated carbonyl gas from the nozzle leads to rapid deposition in the desired localized region. The structure can be built up into complex shapes as desired.
A process for depositing transition elements onto a substrate whereby a chemical vapor deposition (CVD) gas or plasma that is temperature controlled, including but not limited to the carbonyl gases, is directed to flow through a nozzle to the substrate upon which the CVD process deposits the transition metal to a predetermined locality on the substrate;
A nozzle that heats a CVD gas or gases in the range 20-500° C. with a variable orifice that directs the gas to a substrate locality.
A nozzle that passes cool carbon monoxide or other shielding gas to decrease transition metal build up adjacent to a region where build up is desired
Dependencies are inferred from the claim text.