Compliant micro device transfer head

An electrostatic transfer method comprising:

• positioning an array of compliant electrostatic transfer heads over an array of micro devices;
• contacting the array of micro devices with the array of compliant electrostatic transfer heads;
• sensing contact of the array of micro devices with the array of compliant electrostatic transfer heads;
• applying a voltage to the array of compliant electrostatic transfer heads to create a grip pressure for each compliant electrostatic transfer head;
• picking up the array of micro devices with the array of compliant electrostatic transfer heads;
• and
• releasing the array of micro devices onto a receiving substrate.