Imprint apparatus, imprint method, and article manufacturing method

An imprint method of bringing a mold into contact with an imprint material on a substrate to perform patterning, the method comprising steps of:

• performing driving for moving at least one of the mold and the substrate;
• detecting a state of the driving;
• and
• performing decision that release of the mold is started based on the detecting,
• wherein the driving is performed so as to decrease a force for the release by the driving in accordance with the decision.

A method of manufacturing an article, the method comprising steps of:

• performing patterning on a substrate using an imprint apparatus;
• and
• processing the substrate, on which the patterning has been performed, to manufacture the article,
• wherein the imprint apparatus brings a mold into contact with an imprint material on the substrate to perform the patterning and includes:
• a mold holder configured to hold the mold;
• a substrate holder configured to hold the substrate;
• a driving device configured to move at least one of the mold holder and the substrate holder;
• a detector configured to detect a state of the driving device;
• and
• a controller configured to perform decision that release of the mold is started based on an output of the detector and to control the driving device so as to decrease a force for the release by the driving device in accordance with the decision.

A method of manufacturing an article, the method comprising steps of:

• performing patterning on a substrate using an imprint apparatus;
• and
• processing the substrate, on which the patterning has been performed, to manufacture the article,
• wherein the imprint method brings a mold into contact with an imprint material on the substrate to perform the patterning and includes steps of:
• performing driving for moving at least one of the mold and the substrate;
• detecting a state of the driving;
• and
• performing decision that release of the mold is started based on the detecting,
• wherein the driving is performed so as to decrease a force for the release by the driving in accordance with the decision.