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US 2016/0257024 A1Published application
Imprinting mold and the manufacturing method thereof
AssigneeNational Taiwan University of Science and Technology
InventorsJeng-Ywan Jeng, Pei-Ying Wu, Kuo-Hsiang Tu
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Abstract
A method of manufacturing an imprinting mold is provided. The method includes steps of providing a supporting substrate; forming a conductive metal layer on the supporting substrate; polishing the conductive metal layer to form a polished surface; and treating the polished surface to form a plurality of microstructures.
Claims20
A method of manufacturing an imprinting mold, comprising steps of:
- providing a supporting substrate;
- forming a conductive metal layer on the supporting substrate;
- polishing the conductive metal layer to form a polished surface;
- and
- treating the polished surface to form a plurality of microstructures.
2 more elements
An imprinting mold, comprising:
- a supporting substrate;
- a conductive metal layer disposed on the supporting substrate;
- and
- a plurality of microstructures formed on the conductive metal layer.
1 more element
An imprinting mold, comprising:
- a supporting substrate having a working surface;
- and
- a plurality of microstructures formed on the working surface and connected to each other.
An imprinting mold, comprising:
- a rigid supporting substrate having a working surface;
- and
- a plurality of microstructures formed on the working surface and performing an imprinting.
Dependencies are inferred from the claim text.