Manufacturing method of array substrate, array substrate and display apparatus
AssigneesBoe Technology Group Co., Ltd., Hefei Boe Optoelectronics Technology Co., Ltd.
InventorQiyu SHEN
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Abstract
The present invention provides a manufacturing method of an array substrate, an array substrate and a display apparatus. The manufacturing method comprises steps of: forming a thin film transistor and a signal line on a glass substrate, and forming an organic insulating layer above the thin film transistor and the signal line correspondingly; forming a passivation insulating layer on the organic insulating layer, wherein, before forming the passivation insulating layer, the manufacturing method further comprises a step of: performing a pre-heating process on the glass substrate on which the organic insulating layer is formed.
Claims20
A manufacturing method of an array substrate, comprising steps of:
- forming a thin film transistor and a signal line on a glass substrate, and forming an organic insulating layer above the thin film transistor and the signal line correspondingly;
- forming a passivation insulating layer on the organic insulating layer, wherein, before forming the passivation insulating layer, the manufacturing method further comprises a step of:
- performing a pre-heating process on the glass substrate on which the organic insulating layer is formed.
Dependencies are inferred from the claim text.