Lanio3 thin-film-forming composition, and method for forming lanio3 thin-film in which said composition is used
AssigneeMitsubishi Materials Corporation
InventorsJun Fujii, Hideaki Sakurai, Nobuyuki Soyama
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AssigneeMitsubishi Materials Corporation
InventorsJun Fujii, Hideaki Sakurai, Nobuyuki Soyama
Estimating the term…
An LaNiO3 thin-film-forming composition contains an LaNiO3 precursor, an organic solvent and a stabilizer. Also, the mixture ratio of the LaNiO3 precursor relative to a total of 100% by mass of the LaNiO3 precursor, the organic solvent and the stabilizer is 1-20% by mass on an oxide basis. Further, the dispersion component (dD), the polarization component (dP), and the hydrogen bond component (dH) of the HSP value of the organic solvent fulfill the relations 14<dD<20, 3<dP<26, and d3<dH<30, respectively.
An LaNiO3 thin-film-forming composition, comprising an LaNiO3 precursor, an organic solvent and a stabilizer, wherein
Dependencies are inferred from the claim text.