Copolymer formulation for directed self-assembly, methods of manufacture thereof and articles comprising the same
AssigneesDow Global Technologies LLC, Rohm and Haas Electronic Materials LLC, The Regents of the University of California
InventorsPhillip D. Hustad, Peter Trefonas, III, Valeriy V. Ginzburg, Bongkeun Kim, Glenn H. Fredrickson
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