Columnar crystal containing light emitting element and method of manufacturing the same
AssigneeSophia School Corporation
InventorsAkihiko KIKUCHI, Katsumi KISHINO
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Abstract
A method of manufacturing a semiconductor element by forming, on a substrate, columnar crystals of a nitride-base or an oxide-base compound semiconductor, and by using the columnar crystals, wherein on the surface of the substrate, the columnar crystals are grown while ensuring anisotropy in the direction of c-axis, by controlling ratio of supply of Group-III atoms and nitrogen, or Group-II atoms and oxygen atoms, and temperature of crystal growth, so as to suppress crystal growth in the lateral direction on the surface of the substrate.
Claims12
A method of manufacturing a semiconductor element by forming, on a substrate, columnar crystals of a nitride-base or an oxide-base compound semiconductor, and by using thus-formed columnar crystals,
- wherein on a surface of said substrate, said columnar crystals are grown while ensuring anisotropy in a direction of c-axis, by controlling ratio of supply of Group-III atoms and nitrogen, or Group-II atoms and oxygen atoms, and temperature of crystal growth, so as to suppress crystal growth in a lateral direction on the surface of the substrate.
Dependencies are inferred from the claim text.