Measurement Method and Electron Microscope

An electron microscope for obtaining at least one STEM (scanning transmission electron microscope) image by detecting electrons transmitted through a sample, said electron microscope comprising:

• a segmented detector having a detection surface for detecting the electrons transmitted through the sample, the detection surface being divided into a plurality of detector segments;
• and
• an arithmetic section for finding the directions of the detector segments relative to the STEM image;
• wherein said arithmetic section performs processing to find the directions of the detector segments relative to the STEM image from the direction of a deviation of the STEM image caused by defocusing.

An electron microscope for obtaining STEM images by detecting electrons transmitted through a sample, said electron microscope comprising:

• a segmented detector having a detection surface for detecting the electrons transmitted through the sample, the detection surface being divided into a plurality of detector segments;
• and
• an image processor for performing processing to generate an image indicating the directions of the detector segments relative to the STEM images;
• wherein said image processor generates this image by subtracting one of two STEM images from the other, the two STEM images being obtained from two different ones of the detector segments under a defocused condition.