Method and apparatus for facilitating manufacturing of semiconductor device
AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorQiang FAN
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AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorQiang FAN
Estimating the term…
A method for facilitating semiconductor device manufacturing may include the following steps: receiving a custom design data set, which complies with a first element-identification scheme; generating a compatible design data set using the custom design data set, wherein data elements in the compatible design data set correspond to data elements in the custom design data set, and wherein the compatible design data set is compatible with a dummy-pattern-data generation module; generating a first dummy-pattern data set using the dummy-pattern-data generation module and the compatible design data set; and generating a second dummy-pattern data set using the first dummy-pattern data set, wherein data elements in the second dummy-pattern data set correspond to data elements in the first dummy-pattern data set, and wherein the second dummy-pattern data set complies with the first element-identification scheme.
A method for facilitating manufacturing of a semiconductor device, the method comprising:
An apparatus for facilitating manufacturing of a semiconductor device, the apparatus comprising:
Dependencies are inferred from the claim text.