Model generating device and method

A model generating method for generating model data regarding an operation state of a target object to be controlled, the model generating method comprising:

• operating the target object while changing a plurality of measurement conditions set for the target object in a first sequence;
• acquiring first measurement data regarding the operation state of the target object under each of the plurality of measurement conditions set in the first sequence;
• operating the target object while changing the plurality of measurement conditions in a second sequence different from the first sequence,
• acquiring second measurement data regarding the operation state of the target object under each of the plurality of measurement conditions set in the second sequence;
• estimating, by a processor, third measurement data indicating the operation state in a case where the target object enters a steady state in each of the plurality of measurement conditions, based on the first measurement data and the second measurement data;
• generating the model data regarding the operation state of the target object based on the third measurement data;
• and
• outputting the model data.

A non-transitory computer-readable storage medium storing a model generating program for generating model data regarding an operation state of a target object to be controlled, the model generating program causing a computer to execute a process, the process comprising:

• operating the target object while changing a plurality of measurement conditions set for the target object in a first sequence;
• acquiring first measurement data regarding the operation state of the target object under each of the plurality of measurement conditions set in the first sequence;
• operating the target object while changing the plurality of measurement conditions in a second sequence different from the first sequence,
• acquiring second measurement data regarding the operation state of the target object under each of the plurality of measurement conditions set in the second sequence;
• estimating, by a processor, third measurement data indicating the operation state in a case where the target object enters a steady state in each of the plurality of measurement conditions, based on the first measurement data and the second measurement data;
• generating the model data regarding the operation state of the target object based on the third measurement data;
• and
• outputting the model data.