Pressure-type flow controller

A pressure-type flow controller, comprising:

• a main body provided with a fluid channel communicating between a fluid inlet and a fluid outlet and an exhaust channel branched from the fluid channel and communicating between the fluid channel and an exhaust outlet;
• a control valve for pressure control fixed to the fluid inlet side of the main body for opening/closing the upstream side of the fluid channel;
• a pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the control valve for pressure control;
• an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel;
• and
• a control valve for exhaust control for opening/closing the exhaust channel.