Semiconductor integrated circuit device including variable frequency type probe test pad and semiconductor system
AssigneeSK hynix Inc.
InventorSeung Geun BAEK
Life of this patent
Estimating the term…
Abstract
A semiconductor integrated circuit device including a variable frequency type probe test pad and a semiconductor system are disclosed. The semiconductor integrated circuit device includes a plurality of probe test pads formed on a semiconductor substrate and configured to induce non-contact electrical coupling with a probe card, and a frequency control unit electrically coupled to each of the plurality of probe test pads, and configured to vary a frequency of each of the plurality of probe test pads.
Claims18
A semiconductor integrated circuit device comprising:
- a plurality of probe test pads formed on a semiconductor substrate and configured to induce non-contact electrical coupling with a probe card;
- and
- a frequency control unit electrically coupled to each of the plurality of probe test pads, and configured to vary a frequency of each of the plurality of probe test pads.
A semiconductor system comprising:
- a semiconductor device including a plurality of probe test pads disposed to face a probe electrode of a probe card, and configured to have an antenna structure and induce non-contact electrical coupling with the probe electrode and a frequency control unit electrically coupled to the plurality of probe test pads and configured to vary frequencies of the plurality of probe test pads;
- and
- a controller configured to perform interfacing with the semiconductor device and transfer a test command to the plurality of probe test pads.
A semiconductor probe testing method comprising:
- providing a plurality of probe test pads adjacent to each other;
- performing a non-contact probe test on a first probe test pad among the plurality of probe test pads in a first frequency;
- and
- performing an other non-contact probe test on a second probe test pad adjacent to the first probe test pad in a second frequency different from the first frequency.
Dependencies are inferred from the claim text.