Systems and Methods for Manufacturing Nano-Electro-Mechanical-System Probes

A microscope probe configured to analyze a sample, the microscope probe comprising:

• a movable probe tip supported by a substrate;
• a first actuator configured to displace the movable probe tip along a first axis;
• and
• a detection component configured to detect motion of the movable probe tip in response to an applied signal;
• a resonator configured to vibrate when the probe is in a vibrational mode;
• and
• a capacitor affixed to the substrate.

A method for analyzing a sample using a microscope probe, the method comprising the steps of:

• providing a microscope probe comprising:
• (i) a movable probe tip supported by a substrate;
• (ii) a resonator configured to vibrate when the probe is in a vibrational mode;
• and (iii) a capacitor affixed to the substrate;
• receiving a current from the capacitor;
• receiving a current from the resonator;
• electrically combining the current from the capacitor and the current from the resonator;
• and
• using the electrically combined current to improve a signal-to-noise ratio of the sample analysis.

A method for implementing a transistor using multiple integrated probe tips, the method comprising the steps of:

• providing a sample;
• providing a microscope probe comprising a plurality of probe tips;
• contacting a first, outer probe tip of the plurality of probe tips to the sample, wherein the first outer probe tip is configured to act as a source terminal for the transistor;
• contacting a second, outer probe tip of the plurality of probe tips to the sample, wherein the second outer probe tip is configured to act as a drain terminal for the transistor;
• using a third, inner probe tip of the plurality of probe tips as a gate terminal for the transistor;
• and
• characterizing the sample with the plurality of probe tips.

A method for implementing a variable resistor, the method comprising the steps of:

• providing a sample;
• providing a microscope probe comprising a plurality of probe tips;
• contacting a first, outer probe tip of the plurality of probe tips to the sample;
• contacting a second, outer probe tip of the plurality of probe tips to the sample;
• contacting a third, inner probe tip of the plurality of probe tips to the sample;
• applying a voltage to either of the first and second outer probe tips, wherein the inner probe tip is deflected toward either the first or second outer probe tips;
• and
• characterizing the sample based on the deflection of the inner probe tip.