Back to results
US 2016/0250855 A1Published application
Piezoelectric device, inkjet head, inkjet printer, and method of manufacturing piezoelectric device
AssigneeKonica Minolta, Inc.
InventorKAZUKI SHIBUYA
Life of this patent
Estimating the term…
Abstract
An actuator as a piezoelectric device has a bonding layer including titanium, a lower electrode including platinum, a piezoelectric thin film, and an upper electrode formed in this order on a substrate. Ti particles precipitate from the bonding layer onto the lower electrode. Pt that forms the lower electrode has a crystal grain size of 75 nm to 150 nm.
Claims15
A piezoelectric device comprising:
- a substrate;
- a bonding layer comprising titanium;
- a lower electrode comprising platinum;
- a piezoelectric thin film;
- and an upper electrode, wherein the bonding layer, the lower electrode, the piezoelectric thin film, and the upper electrode are formed in this order on the substrate,
- titanium from the bonding layer forms a precipitate on the lower electrode, and
- the platinum that forms the lower electrode has a crystal grain size of 75 nm to 150 nm.
4 more elements
A method of manufacturing a piezoelectric device, the method comprising the steps of:
- forming a bonding layer comprising titanium on a substrate;
- forming a lower electrode comprising platinum on the bonding layer;
- forming a piezoelectric thin film on the lower electrode;
- and
- forming an upper electrode on the piezoelectric thin film, wherein
- the step of forming the lower electrode comprises forming the lower electrode in such a way that titanium is precipitated from the bonding layer onto the lower electrode and the platinum has a crystal grain size of 75 nm to 150 nm.
3 more elements
Dependencies are inferred from the claim text.