Processing apparatus and processing method of stack

A method for processing a stack comprising the steps of:

• fixing part of the stack to a fixing mechanism;
• attaching a first adsorption jig, a second adsorption jig and a third adsorption jig to a first periphery of the stack, and attaching a fourth adsorption jig, a fifth adsorption jig and a sixth adsorption jig to a second periphery of the stack;
• moving the first adsorption jig, the second adsorption jig and the third adsorption jig so that a flexible substrate is partially separated from the stack;
• fixing a first clamp jig to the flexible substrate at a position between the first adsorption jig and the second adsorption jig, and fixing a second clamp jig to the flexible substrate at a position between the second adsorption jig and the third adsorption jig;
• and
• moving the first adsorption jig, the second adsorption jig, the third adsorption jig, the first clamp jig and the second clamp jig so that the flexible substrate is separated from the stack.

A method for processing a stack comprising the steps of:

• fixing part of the stack to a fixing mechanism;
• attaching a first adsorption jig, a second adsorption jig and a third adsorption jig to a first periphery of the stack, and attaching a fourth adsorption jig, a fifth adsorption jig and a sixth adsorption jig to a second periphery of the stack;
• moving the first adsorption jig, the second adsorption jig and the third adsorption jig while supplying liquid to the stack so that a flexible substrate is partially separated from the stack;
• fixing a first clamp jig to the flexible substrate at a position between the first adsorption jig and the second adsorption jig, and fixing a second clamp jig to the flexible substrate at a position between the second adsorption jig and the third adsorption jig;
• and
• moving the first adsorption jig, the second adsorption jig, the third adsorption jig, the first clamp jig and the second clamp jig so that the flexible substrate is separated from the stack.