Process component and method to improve mocvd reaction process

A method to improve the MOCVD reaction process, wherein, including the following steps:

• provide a plasma protection film coating device, which includes a vacuum chamber;
• a process component to be coated is fixed in said vacuum chamber, said process component includes a stainless steel body that will contact with the reaction gases in the MOCVD reaction chamber;
• said process component will be coated in the plasma protection film coating device with a compact protection film with the porosity of less than 1%, said protection film is a compound composed of at least one of the Al, Ga and Mg and at least one of the oxygen or nitrogen, or the other materials that will not react with the gases in the MOCVD process;
• the coated process component will be installed in the MOCVD reaction chamber for the MOCVD process, said protection film of the process component will protect the stainless steel body from reacting with the reaction gases in the MOCVD reaction chamber;
• the steps of coating the protection film on the process component in the plasma protection film coating device are as follows:
• put source material in said vacuum chamber;
• put said process component to be coated in said vacuum chamber, and make the surface of the process component face to the source material in the vacuum chamber;
• evaporate or sputter the source material on the surface of the process component to be coated;
• inject the reaction gases and non-reaction gases in said vacuum chamber;
• ionize said reaction gases and non-reaction gases and maintain the plasmas on the surface of the process component to make the ions of the ionized reaction and non-reaction gases hit on the surface of the process component to be coated and react with said source material so as to form compact protection film on at least a part of the surface of the gas showerhead component, wherein, said protection film includes the atoms from the source materials and the atoms from the compositions of said reaction gases.