Semiconductor device
AssigneeFuji Electric Co., Ltd.
InventorYoshihiro IKURA
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Abstract
Provided is a semiconductor device including a plurality of trenches, including an emitter electrode; a floating layer of a first conduction type provided between adjacent trenches; and a low-dielectric-constant film provided between the floating layer and the emitter electrode, in which a dielectric constant of the low-dielectric-constant film is less than 3.9. Also provided is a semiconductor device further including a gate electrode formed in the trenches, in which capacitance between the gate electrode and the floating layer is greater than capacitance between the emitter electrode and the floating layer.
Claims12
A semiconductor device comprising:
- an emitter electrode;
- a plurality of trenches;
- a floating layer of a first conduction type provided between adjacent trenches of the plurality of trenches;
- and
- a low-dielectric-constant film provided between the floating layer and the emitter electrode, wherein
- a dielectric constant of the low-dielectric-constant film is less than 3.9.
Dependencies are inferred from the claim text.