Systems and processes for forming three-dimensional integrated circuits
AssigneeUltratech, Inc.
InventorsArthur W. Zafiropoulo, Yun Wang, Andrew M. Hawryluk
Life of this patent
Estimating the term…
Loading patent…
AssigneeUltratech, Inc.
InventorsArthur W. Zafiropoulo, Yun Wang, Andrew M. Hawryluk
Estimating the term…
Provided are systems and processes for forming a three-dimensional circuit on a substrate. A radiation source produces a beam that is directed at a substrate having an isolating layer interposed between circuit layers. The circuit layers communicate with each other via a seed region exhibiting a crystalline surface. At least one circuit layer has an initial microstructure that exhibits electronic properties unsuitable for forming circuit features therein. After being controllably heat treated, the initial microstructure of the circuit layer having unsuitable properties is transformed into one that exhibits electronic properties suitable for forming circuit feature therein. Also provided are three-dimensional circuit structures optionally formed by the inventive systems and/or processes.
A process for forming a three-dimensional circuit on a substrate, the process comprising:
Dependencies are inferred from the claim text.