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US 2016/0240405 A1Published application
Stand alone anneal system for semiconductor wafers
OwnerVincent Steffan Francischetti, Robert B. Moore +2inventors
InventorsVincent Steffan Francischetti, Robert B. Moore, Mario David Silvetti, Roey Shaviv
Life of this patent
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Abstract
A high throughput stand-alone anneal system has a horizontal row of docking stations at a front wall of an enclosure. A rack in the enclosure has a plurality of vertically stacked anneal modules. Robots within the enclosure move wafers from the docking stations to one of the anneal modules for rapid thermal anneal processing.
Claims15
An anneal system comprising:
- an enclosure;
- a horizontal row of two or more docking stations at a front wall of the enclosure;
- a buffer station in the enclosure;
- a rack in the enclosure having a plurality of vertically stacked anneal modules;
- and
- a system robot within the enclosure movable to carry a wafer from any of the docking stations to the buffer station;
- and
- a rack robot within the enclosure movable to carry a wafer from the buffer station to any of the anneal modules.
5 more elements
A stand-alone anneal system comprising:
- an enclosure;
- a horizontal row of three or more docking stations at a front wall of the enclosure;
- a buffer station in the enclosure;
- a plurality of vertically stacked anneal modules in a rack at one side of the enclosure;
- and
- a first robot within the enclosure having an end effector movable between any of the docking stations and the buffer station;
- and
- a second robot having an end effector movable from the buffer station to any of the anneal modules.
5 more elements
A stand-alone anneal system comprising:
- an enclosure;
- a horizontal row of three or more docking stations at a front wall of the enclosure;
- a plurality of vertically stacked anneal modules in a rack at one side of the enclosure, with each anneal module adapted to anneal a single 300 mm diameter wafer;
- a system robot within the enclosure and having a system end effector movable in three dimensions between any of the docking stations and a buffer station in the enclosure;
- and
- a rack robot having a rack end effector movable from the buffer station to any of the stacked anneal modules.
3 more elements
Dependencies are inferred from the claim text.