Exposure apparatus, exposure method, method of manufacturing device, program, and storage medium

An exposure apparatus for exposing an upper surface of a substrate with exposure light through liquid, the exposure apparatus comprising:

• an optical member that has an emitting surface from which the exposure light is emitted;
• and
• a substrate holding apparatus having a holding portion that releasably holds a lower surface of the substrate, and an upper surface provided around the holding portion, wherein
• the upper surface of the substrate holding apparatus is configured such that the upper surface of the substrate holding apparatus and the upper surface of the substrate held by the holding portion are substantially in a plane,
• the upper surface of the substrate holding apparatus has an undulating edge portion, and
• the substrate is held by the holding portion such that an edge portion of the substrate held by the holding portion is located adjacent to the undulating edge portion of the upper surface of the substrate holding apparatus.

An exposure apparatus for exposing an upper surface of a substrate with exposure light through liquid, the exposure apparatus comprising:

• an optical member that has an emitting surface from which the exposure light is emitted;
• and
• a substrate holding apparatus having a holding portion that releasably holds a lower surface of the substrate, and an upper surface provided around the holding portion, wherein
• the upper surface of the substrate holding apparatus is configured such that the upper surface of the substrate holding apparatus and the upper surface of the substrate held by the holding portion are substantially in a plane,
• an edge of the upper surface of the substrate holding apparatus that is adjacent to the substrate held by the holding portion is shaped so as to form a gap between the edge and a periphery of the substrate held by the holding portion, and
• a size of the gap varies around the periphery of the substrate.

An exposure apparatus for irradiating an upper surface of a substrate with exposure light through liquid in a liquid immersion space formed at an emitting surface of an optical member, the exposure apparatus comprising:

• a first member having a first upper surface with a first edge, the first member is movable below the optical member so that at least a part of the first upper surface comes into contact with the liquid immersion space;
• and
• a second member having a second upper surface with a second edge, the second member is movable below the optical member so that at least a part of the second upper surface comes into contact with the liquid immersion space, wherein
• the first edge and the second edge oppose each other and extend in a predetermined direction,
• a gap is formed between the first edge and the second edge, and
• the first edge includes a plurality of protrusions that protrude toward the second edge.

An exposure method of irradiating an upper surface of a substrate with exposure light through liquid in a liquid immersion space formed at an emitting surface of an optical member, the method comprising:

• moving a first member having a first upper surface with a first edge below the optical member so that at least a part of the first upper surface comes into contact with the liquid immersion space;
• and
• moving a second member having a second upper surface with a second edge below the optical member so that at least a part of the second upper surface comes into contact with the liquid immersion space, wherein
• the first edge and the second edge oppose each other and extend in a predetermined direction,
• a gap is formed between the first edge and the second edge, and
• the first edge includes a plurality of protrusions that protrude toward the second edge.

An exposure apparatus for exposing an upper surface of a substrate with exposure light through liquid, the exposure apparatus comprising:

• an optical member that has an emitting surface from which the exposure light is emitted;
• and
• a substrate holding apparatus having a holding portion that releasably holds a lower surface of the substrate, and an upper surface of the substrate holding apparatus provided around the holding portion, wherein
• the upper surface of the substrate holding apparatus is configured such that the upper surface of the substrate holding apparatus and the upper surface of the substrate held by the holding portion are substantially in a plane,
• an edge of the upper surface of the substrate holding apparatus extends around and opposes an outer periphery of the substrate held by the holding portion, and
• the edge of the upper surface of the substrate holding apparatus includes a plurality of protrusions that protrude toward the holding portion.