Lithography apparatus, lithography method, program, lithography system, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsYoshikazu Miyajima, Hitoshi Nakano
Life of this patent
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Abstract
A lithography apparatus has a plurality of processing units configured to respectively perform patternings on a plurality of substrates that belong to a lot, and a controller configured to perform, based on specific information that specifies one of the plurality of substrates, determination of one of the plurality of processing units that processes the one of the plurality of substrates, and control the plurality of processing units such that the patternings are performed on the plurality of substrates respectively with the plurality of processing units in parallel based on recipe information corresponding to the lot.
Claims18
A lithography apparatus comprising a plurality of processing units configured to respectively perform patternings on a plurality of substrates that belong to a lot, the apparatus comprising:
- a controller configured to perform, based on specific information that specifies one of the plurality of substrates, determination of one of the plurality of processing units that processes the one of the plurality of substrates, and control the plurality of processing units such that the patternings are performed on the plurality of substrates respectively with the plurality of processing units in parallel based on recipe information corresponding to the lot.
A lithography method of performing patternings on a plurality of substrates that belong to a lot respectively with a plurality of processing units in parallel, the method comprising steps of:
- performing, based on specific information that specifies one of the plurality of substrates, determination of one of the plurality of processing units which processes the one of the plurality of substrates;
- and
- performing patterning on the plurality of substrates respectively with the plurality of processing units in parallel based on recipe information corresponding to the lot.
A computer-readable storage medium which stores a program for causing a computer to execute a method of performing patternings on a plurality of substrates that belong to a lot respectively with a plurality of processing units in parallel, the method including steps of:
- performing, based on specific information that specifies one of the plurality of substrates, determination of one of the plurality of processing units which processes the one of the plurality of substrates;
- and
- performing patterning on the plurality of substrates respectively with the plurality of processing units in parallel based on recipe information corresponding to the lot.
A method of manufacturing an article, the method comprising steps of:
- performing patterning on a substrate using a lithography apparatus;
- processing the substrate, on which the patterning has been performed, to manufacture the article,
- wherein the lithography apparatus includes a plurality of processing units configured to respectively perform patternings on a plurality of substrates that belong to a lot, the apparatus including:
- a controller configured to perform, based on specific information that specifies one of the plurality of substrates, determination of one of the plurality of processing units that processes the one of the plurality of substrates, and control the plurality of processing units such that the patternings are performed on the plurality of substrates respectively with the plurality of processing units in parallel based on recipe information corresponding to the lot.
A method of manufacturing an article, the method comprising steps of:
- performing patterning on a substrate using a lithography method;
- and
- processing the substrate, on which the patterning has been performed, to manufacture the article,
- wherein the lithography method performs patternings on a plurality of substrates that belong to a lot respectively with a plurality of processing units in parallel, the method including steps of:
- performing, based on specific information that specifies one of the plurality of substrates, determination of one of the plurality of processing units which processes the one of the plurality of substrates;
- and
- performing patterning on the plurality of substrates respectively with the plurality of processing units in parallel based on recipe information corresponding to the lot.
A method of manufacturing an article, the method comprising steps of:
- performing patterning on a substrate using a lithography system;
- and
- processing the substrate, on which the patterning has been performed, to manufacture the article,
- wherein the lithography system includes:
- a lithography apparatus;
- and
- a preprocessing apparatus configured to supply a substrate to the lithography apparatus,
- wherein the lithography apparatus includes a plurality of processing units configured to respectively perform patternings on a plurality of substrates that belong to a lot, the lithography apparatus including:
- a controller configured to perform, based on specific information that specifies one of the plurality of substrates, determination of one of the plurality of processing units that processes the one of the plurality of substrates, and control the plurality of processing units such that the patternings are performed on the plurality of substrates respectively with the plurality of processing units in parallel based on recipe information corresponding to the lot.
Dependencies are inferred from the claim text.