Vacuum drying apparatus and vacuum drying method using the same
AssigneeBoe Technology Group Co., Ltd.
InventorHao Wang
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Abstract
An embodiment of the present invention provides a vacuum drying apparatus and a vacuum drying method. The vacuum drying apparatus includes a chamber in which a substrate table is arranged, the chamber being provided with a wind deflector therein, wherein the wind deflector comprises a top opening, a bottom opening and a body part connecting the top opening with the bottom opening. During the vacuum drying, the bottom opening is in tight contact with a surface of the substrate table, and there is a gap between the top Opening and the top of the chamber and a material on the substrate table is covered by the wind deflector.
Claims20
A vacuum drying apparatus comprising a chamber in which a substrate table is arranged, the chamber being provided with a wind deflector therein, wherein the wind deflector comprises a top opening, a bottom opening and a body part connecting the top opening with the bottom opening, and wherein during the vacuum drying operation, the bottom opening is in tight contact with a surface of the substrate table, and there is a gap between the top opening and the top of the chamber and a material on the substrate table is covered by the wind deflector.
Dependencies are inferred from the claim text.