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US 2016/0237579 A1Published application
Nitrogen containing polymers as levelers
AssigneesRohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
InventorsLingli Duan, Zuhra I. Niazimbetova, Chen Chen, Tong Sun, Maria Rzeznik
Life of this patent
Estimating the term…
Abstract
Polymers of reaction products of polyamines and nitrogen containing cyclic compounds are included in metal electroplating compositions to provide level metal deposits on substrates.
Claims8
A polymer comprising a reaction product comprising one or more polyamines and one or more nitrogen containing compounds having formula:
- wherein A is a substituted or unsubstituted 5-6 membered aromatic heterocyclic ring, a substituted or unsubstituted 5-6 membered aromatic carbocyclic ring or a substituted or unsubstituted fused heterocyclic ring system of a five membered heterocyclic ring to a six membered carbocyclic or heterocyclic ring, R is a covalent bond, linear or branched (C1-C12)alkyl, —NH—, —R2NH— or —R2NHR3— joining the carbon atom or heteroatom of ring A or an atom of a substituent group on ring A to the —C(O)—O—R1, n is an integer of 2 or greater, R2 and R3 are the same or different and are linear or branched (C1-C12)alkyl, and with the proviso that there is at least one nitrogen atom in either ring A, a substituent group on ring A or in R, and R1 is hydrogen or linear or branched (C1-C12)alkyl, optionally the nitrogen compounds have a net positive charge.
A metal electroplating composition comprises:
- one or more sources of metal ions, an electrolyte, and one or more polymers, the polymers comprise a reaction product of one or more polyamines and one or more nitrogen containing compounds having formula:
- wherein A is a substituted or unsubstituted 5-6 membered aromatic heterocyclic ring, a substituted or unsubstituted 5-6 membered aromatic carbocyclic ring or a substituted or unsubstituted fused heterocyclic ring system of a five membered heterocyclic ring to a six membered carbocyclic or heterocyclic ring, R is a covalent bond, linear or branched (C1-C12)alkyl, —NH—, —R2NH— or —R2NHR3— joining the carbon atom or heteroatom of ring A or an atom of a substituent group on ring A to the —C(O)—O—R1, n is an integer of 2 or greater, R2 and R3 are the same or different and are linear or branched (C1-C12)alkyl, and with the proviso that their is at least one nitrogen atom in ring A, a substituent group on ring A or in R, and R1 is hydrogen or linear or branched (C1-C12)alkyl, optionally the nitrogen compounds have a net positive charge.
A method comprising:
- a) contacting a substrate to be plated with a metal electroplating composition comprising:
- one or more sources of metal ions, an electrolyte, and one or more polymers, the one or more polymers comprise a reaction product of one or more polyamines and one or more nitrogen containing compounds having formula:
- wherein A is a substituted or unsubstituted 5-6 membered aromatic heterocyclic ring, a substituted or unsubstituted 5-6 membered aromatic carbocyclic ring or a substituted or unsubstituted fused heterocyclic ring system of a five membered heterocyclic ring to a six membered carbocyclic or heterocyclic ring, R is a covalent bond, linear or branched (C1-C12)alkyl, —NH—, —R2NH— or —R2NHR3— joining the carbon atom or heteroatom of ring A or an atom of a substituent group on ring A to the —C(O)—O—R1, n is an integer of 2 or greater, R2 and R3 are the same or different and are linear or branched (C1-C12)alkyl, and with the proviso that their is at least one nitrogen atom in ring A, a substituent group or ring A or in R, and R1 is hydrogen or linear or branched (C1-C12)alkyl, optionally the nitrogen compounds have a net positive charge;
- b) applying a current;
- and
- c) depositing a metal on the substrate.
3 more elements
Dependencies are inferred from the claim text.