Method for manufacturing microcantilever
AssigneeIndustry-University Cooperation Foundation Sogang University
InventorsJung Chul Lee, Il Lee
Life of this patent
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Abstract
Disclosed is a method for manufacturing a microcantilever having a predetermined thickness that includes forming a liquid synthetic resin for cantilevers to a thickness corresponding to the thickness of the microcantilever on an upper surface of a base block having an adhesive base and a non-adhesive base, and curing the liquid synthetic resin for cantilevers via a boundary between the adhesive base and the non-adhesive base, wherein the adhesive base has stronger adhesivity to the cured synthetic resin for cantilevers than the non-adhesive base.
Claims24
A method for manufacturing a microcantilever having a predetermined thickness comprising:
- providing a base block having an adhesive base and a non-adhesive base;
- supplying a liquid synthetic resin for cantilevers to a thickness corresponding to the thickness of the microcantilever to an upper surface of the base block;
- and
- curing the liquid synthetic resin for cantilevers via a boundary between the adhesive base and the non-adhesive base,
- wherein the adhesive base has stronger adhesivity to the cured synthetic resin for cantilevers than the non-adhesive base.
A microcantilever block comprising:
- a base block having an adhesive base and a non-adhesive base;
- and
- a microcantilever formed by curing a liquid synthetic resin for cantilevers disposed on an upper surface of the base block such that the liquid synthetic resin passes through a boundary between the adhesive base and the non-adhesive base,
- wherein the adhesive base has stronger adhesivity to the cured synthetic resin for cantilevers than the non-adhesive base.
A base block for mounting a microcantilever having a predetermined thickness,
- wherein the base block comprises an adhesive base and a non-adhesive base receiving a liquid synthetic resin for cantilevers for obtaining the microcantilevers on an upper surface thereof, and
- the microcantilever formed by curing the liquid synthetic resin for cantilevers disposed to pass through the boundary between the adhesive base and the non-adhesive base has stronger adhesivity to the adhesive base than the non-adhesive base.
An apparatus for manufacturing a microcantilever comprising:
- an accommodation chamber for accommodating a liquid synthetic resin for cantilevers for the microcantilever;
- and
- a stage on which a base block having an adhesive base and a non-adhesive base is mounted, the stage moving in the accommodation chamber,
- wherein the liquid synthetic resin for cantilevers is supplied to a thickness corresponding to the thickness of the microcantilever to an upper surface of the base block by moving the stage, and the liquid synthetic resin for cantilevers is then cured via a boundary between the adhesive base and the non-adhesive base, to impart stronger adhesivity to the adhesive base than the non-adhesive base.
Dependencies are inferred from the claim text.