Mold, imprint apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsByung-Jin Choi, Mahadevan Ganapathisubramanian, Naoki Murasato, Yoshikazu Miyajima
Life of this patent
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Abstract
A mold includes a pattern portion in which a pattern is formed, and a concave portion formed in the back surface of the pattern portion and having a size to include the pattern portion in a planar view. The edge of the pattern portion has an almost rectangular shape in the planar view. The concave portion has an almost rectangular shape with four rounded corners in the planar view. The shortest distance from each point on a side of the edge of the pattern portion to the edge of the concave portion is constant.
Claims9
A mold comprising:
- a pattern portion in which a pattern is formed;
- and
- a concave portion formed in a back surface of the pattern portion and having a size to include the pattern portion in a planar view,
- wherein an edge of the pattern portion has a rectangular shape in the planar view, and
- the concave portion includes a sidewall portion along a side of the rectangular shape of the pattern portion.
An imprint apparatus for molding an imprint material on a substrate by using a mold, wherein the mold includes:
- a pattern portion in which a pattern is formed;
- and
- a concave portion formed in a back surface of the pattern portion and having a size to include the pattern portion in a planar view,
- wherein an edge of the pattern portion has a rectangular shape in the planar view, and
- the concave portion includes a sidewall portion along a side of the rectangular shape of the pattern portion.
A method of manufacturing an article, the method comprising:
- forming a pattern of an imprint material on a substrate using an imprint apparatus;
- and
- processing the substrate on which the pattern is formed to manufacture the article,
- wherein the imprint apparatus is for molding the imprint material on the substrate by using a mold, the mold including:
- a pattern portion in which a pattern is formed;
- and
- a concave portion formed in a back surface of the pattern portion and having a size to include the pattern portion in a planar view,
- wherein an edge of the pattern portion has a rectangular shape in the planar view, and
- the concave portion includes a sidewall portion along a side of the rectangular shape of the pattern portion.
Dependencies are inferred from the claim text.