Nano-/Micro-Actuator and Gripper with Patterned Magnetic Thin Film and Method Thereof
AssigneeNational Tsing Hua University
InventorsZung-Hang WEI, Chen-Yu HUANG
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Abstract
The present invention discloses the fabrication of nano-/micro-actuator and gripper with patterned magnetic thin film. The design of the actuator comprised highly flexible stretchable structures and patterned magnetic films. The magnetic thin film with elongated shape caused magnetic anisotropy, resulting in single domain resembled magnetic configuration. The design of the magnetic gripper contains double fixtures, double stretchable structures and patterned magnetic thin films and driven similar process as the actuator. The lateral displacement of the double fixtures causes the fixture move near and away from each other and causes opening and closing behavior.
Claims17
A method for forming a micro actuator, comprising:
- providing a substrate;
- forming a stretchable micro structure and an opening on said substrate;
- forming a magnetic thin film pattern on said stretchable micro structure, wherein said magnetic thin film pattern has high magnetic anisotropy to maintain single magnetic domain and removing a portion of said substrate under said stretchable micro structure to form a suspended stretchable micro structure.
A method for forming a micro gripper, comprising:
- providing a substrate;
- forming a double grippers thin film pattern and an opening on said substrate, wherein said double gripper thin film pattern includes a pair of symmetric micro gripper arms, each has a micro gripper structure which locate on one end of the stretchable micro structure;
- forming a magnetic thin film pattern on said stretchable micro structure, wherein said magnetic thin film pattern has high magnetic anisotropy to maintain single magnetic domain;
- and
- removing a portion of said substrate under said double grippers thin film pattern to form a suspended said stretchable micro structure and said micro gripper structure.
Dependencies are inferred from the claim text.